Product Description
In the ever-evolving world of technology, the demand for precision
and reliability in semiconductor handling is paramount. One of the
critical components ensuring this precision is the Silicon Nitride
(Si3N4) ball. Known for its exceptional properties such as high
hardness, wear resistance, and low thermal expansion, Si3N4 balls
are indispensable in various high-tech applications.
Silicon Nitride (Si3N4) balls are ceramic balls with remarkable
properties that make them ideal for use in demanding environments.
Their high hardness, wear resistance, and ability to withstand high
temperatures make them suitable for applications in industries such
as aerospace, military, and defense. Furthermore, their low density
and thermal expansion coefficient, combined with excellent thermal
shock resistance, make them the material of choice for bearing
applications in high-speed and high-temperature environments.
- High Hardness and Wear Resistance: Si3N4 balls exhibit superior hardness, making them resistant to
wear and tear, even under extreme conditions.
- Thermal Stability: They maintain structural integrity and performance at high
temperatures, essential for applications like gas turbines and
automotive engines.
- Corrosion Resistance: Si3N4 balls are chemically inert, providing resistance to
corrosion and extending their lifespan.
- Low Density: This property reduces the weight of components, contributing to
increased efficiency in mechanical systems.
Achieving contamination-free precision in semiconductor handling
requires advanced machining techniques. The ultra-precision
machining of Si3N4 balls involves several innovative methods that
ensure the highest quality and performance.
Magnetohydrodynamic polishing is a cutting-edge technique that
involves the use of a magnetic fluid mixed with abrasives. The
Si3N4 ceramic ball is placed in a cylindrical grinding disc filled
with this mixture. Under the influence of a magnetic field, the
abrasive particles suspended in the fluid polish the ceramic ball,
reducing surface scratches and micro-cracks significantly. This
method offers a high material removal rate and achieves a surface
roughness of 0.01 μm, ensuring a super-smooth, non-damaged finish.
Chemical mechanical polishing (CMP) is widely used for
ultra-precision machining of engineering ceramics. During CMP,
nano-level soft abrasive particles suspended in a liquid medium
generate high temperature and pressure at the contact point with
the Si3N4 ball. This results in a chemical reaction that produces a
new, softer material, which is then removed through mechanical
friction. This technique achieves a surface roughness of 4 nm,
making it ideal for applications requiring contamination-free
surfaces.
Combining ultrasonic vibration with mechanical machining, this
method enhances the polishing process's efficiency. The
introduction of ultrasonic torsional vibration increases processing
speed by 2 to 3 times compared to traditional methods. When used
with magnetorheological polishing technology, it significantly
improves the material removal rate, achieving a surface roughness
of 0.025 μm after just one hour of polishing.
This innovative technique involves arranging small magnetic objects
on polishing discs made of non-magnetic materials. When
magnetorheological polishing fluid is applied, a cluster effect
polishing pad forms, covering the Si3N4 balls. This flexible
contact reduces secondary deformation and ensures high-efficiency
machining without subsurface damage, enhancing both the polishing
efficiency and surface quality.
The unique properties of Si3N4 balls make them suitable for a wide
range of applications across various industries:
- Aerospace and Defense: Used in high-temperature environments such as aircraft engines and
military applications.
- Hybrid and Full Ceramic Bearings: Ideal for electric motor shaft bearings in AC and DC motors,
contributing to the growing trend of electric and autonomous
vehicles.
- Gas Turbines and Automotive Engines: Provide high wear resistance and long service life, reducing
maintenance and operational costs.
To ensure contamination-free precision in semiconductor handling,
it is essential to select the right machining technique based on
the specific application requirements. The choice of polishing
method can significantly impact the performance and longevity of
Si3N4 balls. Additionally, maintaining a clean and controlled
environment during the machining process is crucial to prevent
contamination and ensure optimal results.
Property | Silicon Nitride (Si3N4) | Steel (440C) | Zirconia (ZrO2) | Alumina (Al2O3) |
---|
Density (g/cm³) | 3.2 | 7.8 | 6.0 | 3.9 |
Hardness (HV) | 1,400–1,600 | 700–900 | 1,200–1,300 | 1,500–1,800 |
Fracture Toughness (MPa·m½) | 6–7 | 15–20 | 7–10 | 3–4 |
Compressive Strength (GPa) | 2.5–3.5 | 2.0–2.5 | 2.0–2.3 | 2.0–3.0 |


●Description:
Silicon Nitride Ceramic Ball is the most ideal bearing ball for
bearing applications, due to the excellent properties of silicon
nitride ceramics, it has many irreplaceable advantages comparing to
traditional steel materials, such as: high mechanical strength, low
wear loss, good self-lubrication, low density, high corrosion
resistance, good electrical insulation etc.
Therefore, Silicon Nitride Balls are mostly used for some harsh
working conditions: high speed/super speed bearings, high precision
bearings, bearings in vacuum, high/low temperature bearings.
Moreover, Silicon Nitride Ceramic Balls can also used as valve ball
or measurement balls in chemical pumps/high temperature
pumps/metdering pumps.
●Physical Properties:
Chemical Composition: | Si3N4≥95% |
Bulk Density: | 3.2±0.05g/cm3 |
Elastic Modulus: | 350GPa |
Hardness Vickers: | 1870HV |
Bending Strength: | 780MPa |
Fracture Toughness: | 7.2MPa·m1/2 |
Thermal Expansion Coefficient: | 3.2 10-6/K |
Thermal Conductivity: | 25W/(m·K) |
● Ball Sizes/Grade :
Size (mm) | Φ0.8-180 |
Grade | Vdws | SPH | Vdwl | Ra |
G3 | 0.05-0.08 | ≤0.08 | <0.13 | 0.01 |
G5 | 0.08-0.13 | ≤0.13 | <0.25 | 0.014 |
G10 | 0.15-0.25 | ≤0.25 | <0.5 | 0.02 |
G16 | 0.2-0.4 | ≤0.4 | <0.8 | <0.025 |
G20 | 0.3-0.5 | ≤0.5 | <1 | <0.032 |
G100 | 0.4-0.7 | 0.4-0.7 | <1.4 | <0.0105 |
Factory equipment

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FAQ
1. What sizes and tolerances are available?
Diameter range: 0.5mm to 50mm (custom sizes possible).
Sphericity: As low as 0.1µm (Grade 5 for ultra-precision bearings).
Surface finish: Ra < 0.02µm (mirror polish for low friction).
2. Are silicon nitride balls FDA-approved for medical use?
Yes! Si3N4 is biocompatible (ISO 6474-1) and used in spinal implants, dental devices, and joint
replacements due to its antibacterial properties.
3. How do I choose the right Si3N4 balls for my application?
Consider:
Load & speed requirements (dynamic/static stress).
Temperature range (Si3N4 excels in high heat).
Chemical exposure (resistant to most acids/alkalis).
Electrical insulation needs (non-conductive).